| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16d.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 8JMKD3MGP7W/3E9B8AK |
| Repository | sid.inpe.br/mtc-m19/2013/06.09.02.20.14 (restricted access) |
| Last Update | 2013:07.16.19.18.06 (UTC) administrator |
| Metadata Repository | sid.inpe.br/mtc-m19/2013/06.09.02.20.15 |
| Metadata Last Update | 2018:06.05.04.14.13 (UTC) administrator |
| DOI | 10.1016/j.vacuum.2012.09.007 |
| ISSN | 0042-207X |
| Label | scopus |
| Citation Key | CamposTraBagMorCor:2013:DeNaDi |
| Title | Development of nanocrystalline diamond windows for application in synchrotron beamlines  |
| Project | CAPES (074/2008); FAPESP (2007/00013-4) |
| Year | 2013 |
| Month | Mar. |
| Access Date | 2024, May 19 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 1171 KiB |
| 2. Context | |
| Author | 1 Campos, R. A. 2 Trava-Airoldi, Vladimir Jesus 3 Bagnato, O. R. 4 Moro, João Roberto 5 Corat, Evaldo José |
| Resume Identifier | 1 2 3 4 5 8JMKD3MGP5W/3C9JH33 |
| Group | 1 2 LAS-CTE-INPE-MCTI-GOV-BR 3 4 5 LAS-CTE-INPE-MCTI-GOV-BR |
| Affiliation | 1 INPE, Instituto Nacional de Pesquisas Espaciais, LAS, CP 515, 12227-010 São José dos Campos, SP, Brazil 2 INPE, Instituto Nacional de Pesquisas Espaciais, LAS, CP 515, 12227-010 São José dos Campos, SP, Brazil 3 LNLS, Laboratório Nacional de Luz Síncrotron, CP 13083-970 Campinas, SP, Brazil 4 IFSP, Instituto Federal de Educação, Ciência e Tecnologia de São Paulo, CP 770, 12929-600 Bragança Paulista, SP, Brazil 5 INPE, Instituto Nacional de Pesquisas Espaciais, LAS, CP 515, 12227-010 São José dos Campos, SP, Brazil |
| Author e-Mail Address | 1 campos@las.inpe.br 2 vladimir@las.inpe.br 3 4 5 corat@las.inpe.br |
| e-Mail Address | marcelo.pazos@inpe.br |
| Journal | Vacuum |
| Volume | 89 |
| Number | 1 |
| Pages | 21-25 |
| Secondary Mark | B1 B1 B1 B1 B2 B3 B4 |
| History (UTC) | 2018-06-05 04:14:13 :: administrator -> marcelo.pazos@inpe.br :: 2013 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Version Type | publisher |
| Keywords | Electrostatic self assembly High nucleation density Hot filament CVD Multi-step Nano diamond Nanocrystalline diamond films Nanocrystalline diamonds Nucleation densities P-type Pressure tests Silicon anisotropic etching Silicon substrates Smooth surface Synchrotron beamlines Varying thickness Diamond films Diamonds Nanodiamonds Nucleation Synchrotrons Windows Geometry |
| Abstract | A multistep growth and masking method allowed developing windows with controlled geometry inside a silicon frame. In this paper, we present a new method to produce nanocrystalline diamond windows with thickness of about 200 nm to 40 ¼m, with different areas and shapes (circular, rectangular and rounded rectangle). The nanocrystalline diamond (NCD) films deposited on a silicon substrate (100) p-type, had a nucleation density of about 10 11 part/cm 2. Electrostatic self-assembly of nanodiamond seeds (4 nm powder) improved nucleation. Silicon anisotropic etching reveals the window geometry. The high nucleation density enabled smooth surfaces on both sides without the need for polishing the window. Pressure tests were performed in windows of varying thickness. The windows with thickness larger than 10 ¼m supported a pressure gradient of 1 atm. |
| Area | FISMAT |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Development of nanocrystalline... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | 1-s2.0-S0042207X12004095-main.pdf |
| User Group | administrator marcelo.pazos@inpe.br |
| Reader Group | administrator marcelo.pazos@inpe.br |
| Visibility | shown |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| Update Permission | not transferred |
| 5. Allied materials | |
| Linking | Trabalho Vinculado à Tese/Dissertação |
| Mirror Repository | iconet.com.br/banon/2006/11.26.21.31 |
| Next Higher Units | 8JMKD3MGPCW/3ESR3H2 |
| Citing Item List | sid.inpe.br/bibdigital/2013/09.24.19.30 4 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX; SCOPUS. |
| Host Collection | sid.inpe.br/mtc-m19@80/2009/08.21.17.02 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel format isbn lineage mark nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarytype typeofwork url |
| 7. Description control | |
| e-Mail (login) | marcelo.pazos@inpe.br |
| update | |